Design of Atomic Layer Deposition Reactors for the..., 2011

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Title
Design of Atomic Layer Deposition Reactors for the Deposition of Nanoparticle Embedded Thin Films.
Date
2011
Material Type
Graduate Research; Thesis
Creator/Author
Lubitz, Michael.
Copyright
Copyright 2011 by Michael Lubitz. This material is copyrighted and any further reproduction or distribution is prohibited without the permission of the copyright owner.
Subject
Nanoparticles; Thin films; Chemical reactors; Gate array circuits;
Description
Thesis (M.S.)--Central Michigan University, 2011. xi, 68 leaves : ill. Includes bibliographic references (leaves 66-68).
Language
English
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